| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro lens array which can be easily and accurately coupled to an optical fiber array, and to provide a manufacturing method therefor. SOLUTION: Convex lenses L<SB>11</SB>to L<SB>14</SB>are formed on one main surface of a silicon substrate 70. In the substrate 70, guide pin insertion through-holes 72, 74 are formed by selective etching processing or the like on one and the other sides of a lens column including the lenses L<SB>11</SB>to L<SB>14</SB>. Each guide pin insertion through-hole is formed to increase in size as it goes outside. In order to couple the micro lens array of such a structure with an optical components such as optical fibers, each guide pin is just to be inserted into two guide pin insertion grooves (or through-holes) on the optical component side, respectively, with the guide pins inserted through the respective guide pin insertion through-holes 72, 74. Coupling with the optical components can be attained with a positional accuracy of±0.5μm or less. COPYRIGHT: (C)2007,JPO&INPIT
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