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经营范围
发明名称
Method of Modifying a Surface of a Structured Wafer
摘要
申请公布号
KR100638289(B1)
申请公布日期
2006.10.26
申请号
KR20017015751
申请日期
2001.12.07
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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