| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve device capable of achieving miniaturization and cost reduction by simplifying its structure, and keeping high reliability in operation. SOLUTION: This gate valve devices 12A-12D mounted on carrying-in-and-out openings 37 of processing chambers 4A-4D performing prescribed processing on workpiece W, to allow the workpiece to pass therethrough from a conveying chamber 6 side in a vacuum state and to open and close the carrying-in-and-out openings 37, are provided with valve elements 52 seatable to open and close the carrying-in-and-out openings, valve element supporting rods 54 mounted on both end portions of the valve elements along the valve element pressing direction to the carrying-in-out opening, and cam mechanisms 56 connected with the valve element supporting rods for converting the driving force in the direction orthogonal to the valve element supporting rods into propulsive force in the valve element pressing direction of the valve element supporting rod and the torque in the valve element rotating direction in time series. COPYRIGHT: (C)2007,JPO&INPIT
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