Magnetic system for dissipation cathode, with ferromagnetic yoke plates and several groups of magnets with opposite polarity, magnets of first group forming closed,, while magnets of second group form closed, outer magnet row

摘要

Two groups (70,71) of magnets are fitted on yoke plate with opposite polarity. Inner magnet row forms first arc (75) describing angle larger than 180 degeres of first circle (A), as well as second arc (76) of second circle (C).External magnet row forms third arc (78), describing angle of more than 180 degrees of third circle (E) and fourth arc (80) within third circle which surrounds first circle. Independent claims are included for dissipation cathode and coating process of substrate, using magnetron dissipation process.