| 摘要 |
<p>A light modulator semiconductor device (as, for example, a digital micro-mirror device) includes a first layer of dielectric material disposed upon an upper surface of a substrate (102) of the semiconductor device, a first layer of metal disposed upon an upper surface of the first layer of dielectric material (103), and a thick film anti-reflective layer (101) disposed upon an upper surface of the first layer of metal.</p> |
