发明名称 ANODE JOINING DEVICE, METHOD FOR JOINING ANODE, AND METHOD FOR MANUFACTURING ACCELERATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an anode joining device for satisfactorily joining a plurality of substrates arranged between two oppositely arranged electrodes which can satisfactorily join anodes without warping convexly to the surface to be joined by giving excessive stress to the substrates. SOLUTION: The anode joining device has a pair of electrodes arranged such that a first electrode opposes a second electrode, wherein the first electrode carries multilayer substrates, and the second electrode opposes the first electrode and has a bend in which a central part is bent toward the multilayer substrates. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006290668(A) 申请公布日期 2006.10.26
申请号 JP20050112307 申请日期 2005.04.08
申请人 OKI ELECTRIC IND CO LTD;MIYAZAKI OKI ELECTRIC CO LTD 发明人 SUEYOSHI SHINICHI
分类号 C03C27/02;G01P15/00 主分类号 C03C27/02
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