| 摘要 |
A transportation system for a disk-like object and a system for inspecting a disk-like object are disclosed. The transportation system comprises a first element ( 10 ) and a second element ( 20 ) which are arranged in such a way that between the first element ( 10 ) and the second element ( 20 ) a free space is formed. The first element ( 10 ) has a surface ( 10 a) facing the free space, the second element ( 20 ) also has a surface ( 20 a) facing the free space. A plurality of openings ( 24 ) is formed in the two surfaces ( 10 a, 20 a), through which pressurized air exits in order to hold the disk-like object ( 11 ) in the free space ( 30 ) in a levitating manner.
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