发明名称 Bake plate having engageable thermal mass
摘要 A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.
申请公布号 US2006237430(A1) 申请公布日期 2006.10.26
申请号 US20050174681 申请日期 2005.07.05
申请人 APPLIED MATERIALS, INC. 发明人 QUACH DAVID H.;ISHIKAWA TETSUYA
分类号 H05B3/68 主分类号 H05B3/68
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