SCRIPT GENERATION SYSTEM AND SCRIPT GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a script generation system and scrip generation method generating the script for a photomask dimensional inspection machine capable of implementing dimensional inspection of a photomask to make measurement efficient in spite of scaling down of graphics and increasing of measurement points, and further, capable of exactly specifying dimension measurement points.

SOLUTION: The script is used for making a photomask dimensional inspection machine perform dimensional inspection by assigning dimension measurement points and is used for performing the dimension measurement of the graphics by making the BOX indicating the dimension measurement region as the region thereof within the BOX correspondent to each of the respective measurement positions of the photomask which is the target for the dimension measurement and by recognizing the edge position of the intended dimension measurement graphics. The script generation system generates the above script by using the drawing graphic data for photomask production. The script generation system generates the script from the measurement point list and the image data for pattern matching for exact measurement of each measurement point.

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