| 摘要 |
PROBLEM TO BE SOLVED: To share two different kinds of inspections to enhance inspection precision, and further to reduce an incidence of defective contact in an inspection pad to enhance inspection accuracy, in the inspection of an array substrate. SOLUTION: This array substrate is provided with a connection pad group 15 having a plurality of connection pads connected respectively to a scanning line driving circuit 13 for driving a plurality of scanning lines 8, and a signal line driving circuit 14 for driving a plurality of signal lines 9, the first inspection pad groups 23a, 23b, 24a-24f having the plurality of inspection pads used for the first inspection, the second inspection pad group 26 having the plurality of inspection pads used for the second inspection different from the first inspection, and a selection circuit 25 for connecting the connection pad group 15 to the first inspection pad groups 23a, 23b, 24a-24f when executing the first inspection, and for connecting the connection pad group 15 to the second inspection pad group 26 when executing the second inspection. COPYRIGHT: (C)2007,JPO&INPIT |
