ALUMINUM NITRIDE-BASED POWDER, ITS PRODUCTION METHOD, AND HEAT CONDUCTIVE MATERIAL CONTAINING ALUMINUM NITRIDE-BASED POWDER

摘要

PROBLEM TO BE SOLVED: To provide a new aluminum nitride-based powder which exhibits stable durability to water even under high humidity and temperature conditions and has excellent fillability and thermal conductivity. SOLUTION: The aluminum nitride-based powder comprises combined particles in each of which a coating layer is formed on the surface of an aluminum nitride particle and is characterized in that (1) the coating layer contains Si, O, H, and an alkyl group and (2) the amount of organic carbon contained in the powder is 0.02-1.0 wt.%. COPYRIGHT: (C)2007,JPO&INPIT