发明名称 Electronic emitters with dopant gradient
摘要 Electron emitters and a method of fabricating emitters are disclosed, having a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.
申请公布号 US2006237812(A1) 申请公布日期 2006.10.26
申请号 US20060450033 申请日期 2006.06.08
申请人 CATHEY DAVID A 发明人 CATHEY DAVID A.
分类号 H01L31/00;H01J1/304;H01J9/02 主分类号 H01L31/00
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