<p>At the time of forming a coating pattern by jetting a solution to a substrate (W) by a head (5) having a multitude of nozzles (53a) in a Y direction, the jetting quantities of the solution differ by each of the nozzles (53a) arranged in the Y direction. Coating is performed a plurality of times to form the same coating pattern by shifting the head (5) a distance ( L) in the Y direction, coating thickness variance (unevenness) is corrected and a coat film thickness is made uniform.</p>