发明名称 COATING APPARATUS AND COATING METHOD
摘要 <p>At the time of forming a coating pattern by jetting a solution to a substrate (W) by a head (5) having a multitude of nozzles (53a) in a Y direction, the jetting quantities of the solution differ by each of the nozzles (53a) arranged in the Y direction. Coating is performed a plurality of times to form the same coating pattern by shifting the head (5) a distance ( L) in the Y direction, coating thickness variance (unevenness) is corrected and a coat film thickness is made uniform.</p>
申请公布号 WO2006112453(A1) 申请公布日期 2006.10.26
申请号 WO2006JP308106 申请日期 2006.04.18
申请人 SHIBAURA MECHATRONICS CORPORATION;SHIGEYAMA, AKIHIRO;YAMAZAKI, TAKAHIRO;TOYOSHIMA, NORIO 发明人 SHIGEYAMA, AKIHIRO;YAMAZAKI, TAKAHIRO;TOYOSHIMA, NORIO
分类号 B05D1/26;B05C5/00 主分类号 B05D1/26
代理机构 代理人
主权项
地址