| 摘要 |
PROBLEM TO BE SOLVED: To improve the measurement precision of a 3-dimensional geometry measurement device by improving the gravity compensation mechanism of noncontact measuring probe unit. SOLUTION: The gravity compensation mechanism which is small but high in reliability and safety is realized as follows: the voice coil motor 1 and the air spring 2 are supported by the cabinet 10 which is arranged on the base B; the noncontact probe unit 4 for measuring the height of the object W on the XY stage 7 is driven in the Z-axis direction of gravity direction; the gravity compensation of the Z stage 3 which is mounting the noncontact measurement probe unit 4 is performed by the air spring 2, wherein the voice coil motor 1, the air slider 6 and the air spring 2 are combined. COPYRIGHT: (C)2007,JPO&INPIT
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