PIEZOELECTRIC ACTUATOR AND PUMP

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator appropriate for liquid pumps of a large amount of suction/liquid feeding, by increasing the flexture of the piezoelectric actuator. SOLUTION: In the piezoelectric actuator, electrode films are jointed to both surfaces of a piezoelectric film composed of a piezoelectric material. Expanding/contracting deformation in the direction perpendicular to the voltage application of the piezoelectric film is caused by applying voltages to both electrodes, causing large bending displacement in the direction of voltage application. The piezoelectric film of the piezoelectric actuator is formed with an oblong cut at one or a plurality of points in the thickness direction. Such a piezoelectric actuator with an oblong cut provided to the piezoelectric film from the central part toward the outer peripheral part is included. COPYRIGHT: (C)2007,JPO&INPIT