| 摘要 |
The present invention provides a charged particle beam device. The device comprises an emitter array ( 22 ) for emitting a plurality of charged particle beams ( 8 ). The plurality of charged particle beams are imaged with a lens ( 12 ). An electrode unit ( 14 ) is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit ( 11 ) and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.
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