FLUORESCENCE X-RAY SPECTROSCOPE AND PROGRAM USED THEREFORE

摘要

A florescence X-ray spectroscope for analyzing the composition and area density of a sample by the FP method. The spectroscope computes the theoretical intensities of various samples in a simple way in adequate consideration of the geometry effect and in line with the reality and enables strictly accurate quantitative analysis. The spectroscope has computing means (10) in which the theoretical intensity of the secondary X-rays (6) generated from the elements of a sample (13) is computed according to a hypothetical composition, the hypothetical composition is corrected by computation in a successive approximation way so that the theoretical intensity may agree with the converted measured intensity determined by converting the intensity measured by detecting means (9) into a theoretical intensity scale, and the composition of the sample (13) is computed. The computing means (10) computes the theoretical intensity of the secondary X-rays (6) by simulation for each optical path while using as parameters the size of the sample (13), the intensities of the primary X-rays (2) applied to portions of the sample surfaces (13a), and the angle of incidence f.