| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coordinate-measuring method capable of measuring the coordinates of alignment marks, even when the accuracy of the coordinate measurement of the alignment mark is low in rough alignment. <P>SOLUTION: This measuring method comprises a step for photographing the alignment mark in low-magnification mode, a step for roughly estimating the position of the alignment mark from an image obtained by that photographing, a step for setting an origin of coordinates on a substrate, on the basis of information on the roughly estimated position of the alignment mark, a step for photographing the alignment mark in a high-magnification mode, on the basis of the set origin of the coordinates, a step for detecting the position of the alignment mark from an image obtained from that photographing in the high-magnification mode, a step for resetting the origin of the coordinates on the basis of information on the detected position of the alignment mark, a step for re-photographing the alignment mark in the high-magnification mode, on the basis of the reset origin of the coordinates, and a step for detecting the position of the alignment mark from an image obtained by re-photographing in the high-magnification mode. <P>COPYRIGHT: (C)2007,JPO&INPIT |
