发明名称 METHOD FOR SECURING ARTICLE
摘要 PROBLEM TO BE SOLVED: To provide a method for securing an article certainly to a securing plate when the article is processed and stripping the processed article from the securing plate without applying a load at the end of processing. SOLUTION: In a method for securing an article onto a securing plate which can be vacuum sucked through a porous film produced by passing a film composed of a thermoplastic resin composition containing thermoplastic resin and a filler through a drawing process, the porous film has a porosity of 50-90%, permeability of 0.1-100 sec and an average pore size of 0.01-5μm and the article is secured onto the securing plate by vacuum sacking the article from the securing plate. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006294726(A) 申请公布日期 2006.10.26
申请号 JP20050110694 申请日期 2005.04.07
申请人 SUMITOMO CHEMICAL CO LTD 发明人 MITSUI SHINICHI;YAMAGUCHI TAKANARI;KURODA RYUMA
分类号 H01L21/301 主分类号 H01L21/301
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