| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope digitally processing image signals obtaining the deepest depth of focus and the best resolution in accordance with observation magnification. SOLUTION: The scanning electron microscope is provided with a means of changing optical angles of aperture by changing a plurality of converging lenses and aperture hole diameters, and changes electron beam angles of aperture in accordance with a visual field range equivalent to one pixel, a so-called pixel size. COPYRIGHT: (C)2007,JPO&INPIT
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