Catalyst support substrate, method for growing carbon nanotubes using the same, and the transistor using carbon nanotubes

摘要

A catalyst supporting substrate includes a first region ( 54 ) which is formed on a substrate ( 50 ); and a second region ( 55 ) which is formed covering a part of the first region. The first region ( 54 ) includes a catalyst supporting portion ( 54 a) containing a first material. The second region ( 55 ) includes a catalyst portion ( 55 ) containing a second material which is different from the first material. The first material includes a metal containing at least one of elements selected from the second group to the fourteenth group of the periodic table or a compound thereof. The second material is a catalyst which grows carbon nanotubes in a vapor phase.