发明名称 |
Method for forming nanoscale features |
摘要 |
Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.
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申请公布号 |
US2006237405(A1) |
申请公布日期 |
2006.10.26 |
申请号 |
US20050167463 |
申请日期 |
2005.06.27 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
HUNT ALAN J.;MOUROU GERARD;JOGLEKAR AJIT P.;MEYHOFER EDGAR;NEES JOHN A.;SPOONER GREG |
分类号 |
B23K26/00;B23K26/06;B23K26/073;B23K26/36;B81C1/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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