PIEZOELECTRIC BIMORPH ACTUATOR AND METHOD OF MANUFACTURING THEREOF

摘要

An actuator is disclosed which includes a piezoelectric bimorph. The actuator also includes a substantially moisture impervious and electrically insulating packaging having a cavity around the birnorph providing for acloarance around the bimorph. The packaging includes a carrier having first and second surfaces and an aperture wherein the bimorph is disposed, the packaging further includes f9st and second cover films selectively attached to the first and second surfaces respectively, and at least one flex circuit connected to the bimorph for supplying electrical energy thereto.