MEMS BASED CONDUCTIVITY-TEMPERATURE-DEPTH SENSOR FOR HARSH OCEANIC ENBIRONMENT

摘要

A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine menvironment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.