| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of generating inspection logic used for substrate inspection with a substrate inspection device from a sample image. SOLUTION: In generating inspection logic of a new component with an information processor, a picked up image of the new component is obtained, color distribution trend data indicating the color distribution trend of the focused region are computed from the picked up image of the new component, and the color distribution trend data of each of a plurality of kinds of previously inspected components are acquired. A previously inspected component having color distribution trend similar to that of the new component is selected by comparing the color distribution trend data of the new component with color distribution trend data of the previously inspected component. The picked up image of the selected (previously inspected) component is read from a storage device, and the inspection logic for the new component is generated using the picked up image of the new component and the picked up image of the previously inspected component as teaching data. COPYRIGHT: (C)2007,JPO&INPIT
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