| 摘要 |
PROBLEM TO BE SOLVED: To enhance the accuracy of measurement by inhibiting the migration of ions inside of a case 12 to remove destabilizing factor. SOLUTION: The inertial sensor device equipped with a conductive rotor 11, an electric insulating case 12 a plurality of control electrodes 13 are formed, and a sensor circuit 20 calculating acceleration A, while making a control electrode 13 to produce electrostatic attraction to cancel the fluctuation by detecting those relative displacement, and generating the complementary voltage of both the positive and negative as control voltage to apply to adjacent electrodes 3a and 3b, includes a bias circuit 32 generating the complementary, constant bias voltage±Vof of both the positive and negative capable of receiving transmitted electricity during shutdown of feeding to the sensor circuit 20 and a switching circuit 31 applying the bias voltage to the adjacent electrodes 3a and 3b instead of the control voltage during shutdown of feeding to the sensor circuit 20. COPYRIGHT: (C)2007,JPO&INPIT
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