摘要 |
PROBLEM TO BE SOLVED: To uniformly coat a substrate having an optional material and shape with a very-thin coating film composed of one or more kinds of metals, an inorganic compound and an organic metal compound. SOLUTION: A dispersion is prepared by dispersing powder of the metal, the inorganic compound and/or the organic metal compound in a dispersant or a solution of the metal, the inorganic compound and/or the organic metal compound is prepared. Mist is formed from the dispersion or the solution and is deposited to form the very thin coating film on the substratel having≤30°contact angle with the mist of the dispersion. The surface of the substratel can be degreased so that the contact angle of the mist deposited on the substratel surface is made≤30°. It is preferable that the maximum diameter of the mist of the dispersion is controlled to≤30μm, the diameter of the powder is controlled to≤100 nm, the the maximum diameter of the mist of the solution is controlled to≤30μm and the thickness of the coating film to be formed is controlled to≤1μm. COPYRIGHT: (C)2007,JPO&INPIT
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