| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of correcting warping and performing conveying and coating without deviation of a position while retaining the corrected state in a substrate which can be easily corrected but is returned/warped to the original state when a press is eliminated. SOLUTION: A conveying mechanism part 4 is made to a vacuum conveyor and a suction hole is provided on a chamber 24 in which the vacuum conveyor is contacted/arranged on a belt 12 surface and a back surface of a belt conveying surface. An adsorption part of the chamber 24 is divided, a suction room of rooms divided so as to fit to conveying of the substrate is switched by a sensor and a pressing mechanism 14 for correcting warping of the substrate is provided on a starting of the chamber 24. By positioning the substrate 1, correcting warping of it and adsorbing/conveying it, conveying/coating can be performed while retaining the attitude that warping is corrected and not generating deviation of the position. COPYRIGHT: (C)2007,JPO&INPIT
|
