发明名称 |
RELEASE LAYER COMPRISING DIAMOND-LIKE CARBON (DLC) OR DOPED DLC WITH TUNABLE COMPOSITION |
摘要 |
The present invention pertains to disposing a diamond-like composition on a template, wherein the diamond-like composition acts as a release layer. The diamond-like composition is substantially transparent to actinic radiation, e.g., ultraviolet (UV) light, and will also have a desired surface energy, wherein the desired surface energy minimizes adhesion between the template and an underlying material disposed on a substrate. The diamond-like composition is characterized with a low surface energy that exhibits desirable release characteristics
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申请公布号 |
WO2006073874(A3) |
申请公布日期 |
2006.10.26 |
申请号 |
WO2005US46638 |
申请日期 |
2005.12.21 |
申请人 |
BOARD OF REGENTS, THE UINVERSITY OF TEXAS SYSTEM |
发明人 |
BAILEY, TODD, C.;STACEY, NICHOLAS, A.;EKERD, JOHN G.;ENGBRECHT, EDWARD, R. |
分类号 |
B41N3/00;B05D3/04;B41D7/00;B41F17/00;B41F19/00;B41K3/02;C09D133/12;C09D183/04 |
主分类号 |
B41N3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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