| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element superior in reliability which suppresses reaction such as diffusion, etc. caused between an upper electrode layer of the piezoelectric element and a piezoelectric thin film layer under loading of heat and an electric field, etc. SOLUTION: The piezoelectric element 8, which is formed by laminating a lower electrode layer 2, the piezoelectric thin film layer 3 and the upper electrode layer 5 in this order on one surface of a substrate 1, is provided with a diffusion prevention layer 4 between the upper electrode layer 5 and the piezoelectric thin film layer 3. Therefore, the diffusion reaction caused between the piezoelectric thin film layer 3 and the upper electrode layer 5 due to the load of heat and the electric field, etc. is suppressed. Thus the piezoelectric element 8 with stable properties in which no leakage current is generated is provided. COPYRIGHT: (C)2007,JPO&INPIT
|
