| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact inspection device and an inspection method capable of preparing quickly low temperature and high temperature conditions, capable of enhancing inspection efficiency, and capable of reducing an installation space as small as possible. SOLUTION: This device for inspecting a temperature characteristic of a work of an inspection object has a work supply part 12 for supplying the work for the inspection, an inspection part 40 for heating-measuring and cooling-measuring the work 50 supplied from the work supply part, and a transfer means 20 for transferring the work between the work supply part and the inspection part, the inspection part has measuring parts 42, 43 for conducting the one out of the heating measurement and cooling measurement, in both sides, with a measuring part 41 for conducting the other measurement thereof therebetween, and a conveying means 30 for conveying the work is provided between the measuring part 41 for conducting the other measurement and the measuring parts 42, 43 for conducting the one measurement adjacent thereto. COPYRIGHT: (C)2007,JPO&INPIT
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