发明名称 |
MASK INSPECTION APPARATUS AND METHOD |
摘要 |
Apparatus for optical inspection of an object, comprising: an optical imaging system (5) for generating an actual image of the real object, a calculation unit (12) for calculating an estimated image of an object of desired shape in respect of a known aberration coefficient of the optical imaging system, an image analysis unit (13) for detecting differences between the actual image and the image calculated by the calculation unit (12). |
申请公布号 |
EP1714191(A2) |
申请公布日期 |
2006.10.25 |
申请号 |
EP20050702871 |
申请日期 |
2005.02.02 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
DIRKSEN, PETER;STEFFEN, THOMAS |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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