HEAT TREATING DEVICE AND HEAT TREATING METHOD AND INSULATING UNIT,申请号KR20017009404-传众专利搜索

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发明名称	HEAT TREATING DEVICE AND HEAT TREATING METHOD AND INSULATING UNIT
摘要
申请公布号	KR100638946(B1)	申请公布日期	2006.10.25
申请号	KR20017009404	申请日期	2001.07.26
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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