| 摘要 |
A leak-testing technique and apparatus (20) for differential pressure sensor arrays (22) is provided. A reference pressure sensor array (26) is provided, wherein a seal (24) is disposed between the reference pressure sensor array (26) and a target differential pressure sensor array (22). A probe socket (28) is utilized to communicate with each individual sensor (27) in the reference pressure sensor array (26). The target pressure sensor array (22) and the reference pressure sensor array (26) are sealed via a pressure plate (38) and plunger assembly (40). The target pressure sensor array (22), seal (24), and reference pressure sensor array (26) are exposed to a first pressure. The target differential pressure sensor array (22), seal (24), and reference pressure sensor array (26) are then exposed to a second pressure. The probe socket (28) verifies that all reference pressure sensors (27) continue to output the first pressure. If the probe socket (28) identifies a reference pressure sensor (27) that reads the second pressure, then the corresponding target pressure sensor (23) is identified as being defective because of leakage.
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