发明名称 |
EXHAUST GAS TREATING AGENT, METHOD FOR TREATING EXHAUST GAS AND APPARATUS FOR TREATING EXHAUST GAS |
摘要 |
<p>The exhaust gas treatment agent of the present invention is an exhaust gas treatment agent provided with a particulate and porous structure, and composed of calcium hydroxide occupying at least a portion of the surface thereof, and calcium oxide occupying the remainder. The specific surface area if preferably 1 m 2 /g or more, and the void fraction is preferably 10 to 50% by volume. This calcium oxide is obtained by baking particulate calcium carbonate, and exhaust gas discharged from a semiconductor production device is removed of harmful gas components by allowing the exhaust gas to contact and react with this exhaust gas treatment agent while in the gaseous state.</p> |
申请公布号 |
EP1714690(A1) |
申请公布日期 |
2006.10.25 |
申请号 |
EP20050709308 |
申请日期 |
2005.01.25 |
申请人 |
TAIYO NIPPON SANSO CORPORATION |
发明人 |
HASEGAWA, HIDEHARU,;ISHIHARA, YOSHIO,;SUZUKI, KATSUMASA |
分类号 |
B01D53/68;B01J20/04 |
主分类号 |
B01D53/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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