发明名称 METHOD FOR FORMING REGISTOR IN SEMICONDUCTOR DEVICE
摘要 A method of fabricating a resistor of a semiconductor device is provided to decrease size of the device by reducing space between the resistors. A first poly-silicon layer(22a), an isolation layer, and a second poly-silicon layer(26) are sequentially formed on a semiconductor device. The second poly-silicon layer and the isolation layer are patterned. An ion implanting process is performed on a whole surface of a substrate which the patterned second poly-silicon layer is formed on so that ions are implanted on the second poly-silicon layer and the first poly-silicon layer. The first poly-silicon layer is a poly-silicon layer used in a lower electrode for forming a PIP capacitor. The second poly-silicon layer is a poly-silicon layer used in an upper electrode for forming the PIP capacitor. The first contact(28a) is formed to contact to the upper of the first poly-silicon layer, and a second contact(28b) is formed to contact to the upper of the second poly-silicon layer. The first contact and the second contact are both connected.
申请公布号 KR100640975(B1) 申请公布日期 2006.10.25
申请号 KR20050134449 申请日期 2005.12.29
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 SUNG, WOONG JE
分类号 H01L27/04 主分类号 H01L27/04
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