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发明名称
摘要
申请公布号	JP3837903(B2)	申请公布日期	2006.10.25
申请号	JP19980097897	申请日期	1998.04.09
申请人		发明人
分类号	C23C14/08;H01L21/28;H01L21/203;H01L21/3205;H01L23/52;H01R13/03;H01R24/00;H05K9/00	主分类号	C23C14/08
代理机构		代理人
主权项
地址

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