VACUUM DEPOSITION METHOD AND SEALED-TYPE EVAPORATION SOURCE APPARATUS FOR VACUUM DEPOSITION,申请号EP20050704227-传众专利搜索

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发明名称	VACUUM DEPOSITION METHOD AND SEALED-TYPE EVAPORATION SOURCE APPARATUS FOR VACUUM DEPOSITION
摘要
申请公布号	EP1713948(A2)	申请公布日期	2006.10.25
申请号	EP20050704227	申请日期	2005.01.21
申请人	IONIZED CLUSTER BEAM TECHNOLOGY CO., LTD.;FUTABA CORPORATION	发明人	TAKAGI, TOSHINORI;NAKAMURA, HIROKI;WATANABE, HIROSHI;FUKUDA, TATSUO
分类号	C23C14/24;C30B23/06	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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