发明名称 |
METHOD OF MANUFACTURING BY LASER WORKPIECES |
摘要 |
<p>A laser processing protection sheet (2) capable of effectively preventing contamination on the surface of an article to be processed by decomposition products when the article to be processed (1) is processed by the UV absorption ablation of a laser beam (7). A production method for a laser processed article (10) using the laser processing protection sheet (2). The laser processing protection sheet (2) is provided on the laser beam incident surface side of the article to be processed (1) when the article (1) is processed by the UV absorption ablation of the laser beam (7).</p> |
申请公布号 |
EP1714730(A1) |
申请公布日期 |
2006.10.25 |
申请号 |
EP20040799471 |
申请日期 |
2004.11.02 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
URAIRI, MASAKATSU;HINO, ATSUSHI;MATSUO, NAOYUKI;TAKAHASHI, TOMOKAZU;MATSUMURA, TAKESHI;YAMAMOTO, SYOUJI |
分类号 |
H05K3/00;B23K26/18;C09J7/02;H01L21/301 |
主分类号 |
H05K3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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