发明名称 SEMICONDUCTOR DEVICES HAVING LOW RESISTIVE CONTACT ON P-TYPE LAYER OF WIDE BAND GAP COMPOUND SEMICONDUCTING MATERIAL AND METHODS FOR MANUFACTURING THE SAME
摘要 A semiconductor device having a low resistive contact on a p-type layer of a wide band gap compound semiconductor layer and a method for manufacturing the same are provided to reduce a resistance between a p-type conductive layer and a contact therewith. A p-type gallium-nitrogen system compound semiconductor layer(610) is formed on a substrate(600). P-type carbon nano tube layers(620) are formed to be connected to the p-type gallium-nitrogen system compound semiconductor layer. A metal contact(630) is formed to be connected to the p-type carbon nano tube layers. The p-type gallium-nitrogen system compound semiconductor layer is one selected from the group consisting of GaN, AlxGaN, and InxGayN. The p-type gallium-nitrogen system compound semiconductor layer is a semiconductor layer in which magnesium Mg is implanted as an impurity.
申请公布号 KR100640661(B1) 申请公布日期 2006.10.25
申请号 KR20050071686 申请日期 2005.08.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, KYU PIL
分类号 H01L29/73;H01L29/737 主分类号 H01L29/73
代理机构 代理人
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