发明名称 Method for reducing single bit data loss in a memory circuit
摘要 The present invention includes a method for reducing random bit data loss in a memory circuit. The method comprises a semiconductor layer that has a surface. The semiconductor layer is exposed at an elevated temperature to an atmosphere comprising deuterium thereby forming a film on the semiconductor layer comprising deuterium. A memory circuit is fabricated on or within the semiconductor layer.
申请公布号 US7125768(B2) 申请公布日期 2006.10.24
申请号 US19990382442 申请日期 1999.08.25
申请人 MICRON TECHNOLOGY, INC. 发明人 REINBERG ALAN R.
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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