发明名称 Fabrication monitoring system
摘要 System and method for monitoring a fabrication process. Generally, an actual-to-planned variance is calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the planned quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site. Furthermore, a planned-to-actual variance may be calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the actual quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site.
申请公布号 US7127314(B2) 申请公布日期 2006.10.24
申请号 US20040811087 申请日期 2004.03.25
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 PAN CHIN-CHENG;CHANG CHAO-FAN;HUANG PAI-CHENG;WU OLIVER
分类号 G06F19/00;H01L21/00 主分类号 G06F19/00
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