发明名称 Ion beam for enhancing optical properties of materials
摘要 A system and method to expose a material to an ion beam during a continuous material production process may include a vacuum fixture to form the ion beam and a slit in the fixture to allow at least a portion of the ion beam to exit the fixture through the slit. The material can be placed in contact with an exterior area of the fixture so as to cover the slit. With the material in place, the vacuum within the fixture may be maintained and the ion beam formed. The material over the slit can be exposed to the ion beam. As the continuous process moves material past the slit, the vacuum within the vacuum fixture may help to maintain the material in contact with the fixture.
申请公布号 US7125587(B2) 申请公布日期 2006.10.24
申请号 US20020151271 申请日期 2002.05.20
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC. 发明人 VIVIANI GARY L.
分类号 B05D5/06;B05D3/06;C23C14/02;C23C14/04;C23C14/48;C23C16/02;G02F1/1337;H01J37/317 主分类号 B05D5/06
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