发明名称 |
Molded fluoroelastomer with excellent detachability and process for producing the same |
摘要 |
There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 mum or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.
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申请公布号 |
US7125598(B2) |
申请公布日期 |
2006.10.24 |
申请号 |
US20020258066 |
申请日期 |
2002.10.18 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
YAMATO TAKAFUMI;HIGASHINO KATSUHIKO;TANAKA HIROYUKI;NOGUCHI TSUYOSHI;KISHINE MITSURU |
分类号 |
D06N7/04;B32B1/00;C08J3/28;C08J5/00;C08J7/00;C08J7/04;C08K3/22 |
主分类号 |
D06N7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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