发明名称 Capacitor with carbon nanotubes
摘要 In one embodiment, a capacitor comprises a substrate defining a first electrical terminal; a catalyst layer disposed on the substrate; a plurality of carbon nanotubes disposed on the catalyst layer; a dielectric layer disposed over the plurality of carbon nanotubes; and a conductive layer disposed on the dielectric layer and defining a second electrical terminal.
申请公布号 US7126207(B2) 申请公布日期 2006.10.24
申请号 US20050089922 申请日期 2005.03.24
申请人 INTEL CORPORATION 发明人 MOSLEY LARRY E.;VU QUAT T.;ZHANG YUEGANG
分类号 H01L51/30 主分类号 H01L51/30
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