摘要 |
A device for holding measurement instruments ( 2 ), in particular interferometers, is formed from a plurality of structure elements ( 4, 5, 6, 7 ) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion alpha. The structure elements ( 4 ) on which the measurement instruments ( 2 ) are arranged are secured between at least two structure side parts ( 5 ) in such a way that the thermal expansions of the structure side parts ( 5 ) and of the connections ( 3 ) have no effect in the measurement direction of the measurement instruments ( 2 ).
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