发明名称 |
Bis-o-nitrophenols derivatives and poly-o-hydroxyamides, polybenzoxazoles, materials, and microelectronic devices made therefrom |
摘要 |
Materials for dielectrics and/or buffer layers in microelectronics utilize polymers can be based on bis-o-nitrophenols. The bis-o-nitrophenols carry a tert-butoxycarbonyl group on at least one of the hydroxyl groups. The polybenzoxazoles prepared from these compounds have a lower dielectric constant than corresponding polymers which are prepared from bis-o-nitrophenols that do not have a tert-butoxycarbonyl group.
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申请公布号 |
US7125814(B2) |
申请公布日期 |
2006.10.24 |
申请号 |
US20020244301 |
申请日期 |
2002.09.16 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
SEZI RECAI |
分类号 |
H01L21/31;C07C69/96;C07C205/43 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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