发明名称 |
Method and system for estimating manufacturing target bias |
摘要 |
A computer implemented method for estimating manufacturing target bias for products in manufacturing tools. The method first establishes a first data set according to manufacturing target bias history based on a correlation with tools used. The manufacturing tools comprise a first manufacturing tool and other manufacturing tools. Next, a testing operation is executed for a predicted product in the first manufacturing tool to obtain a first predicted manufacturing target bias. Finally, manufacturing target bias of the predicted product in the other manufacturing tools is calculated according to the first data set and the first predicted manufacturing target bias.
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申请公布号 |
US7127316(B2) |
申请公布日期 |
2006.10.24 |
申请号 |
US20040994078 |
申请日期 |
2004.11.19 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HSU YEN-PU;WEI CHENG HSIEN;WU MEI-JEN |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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