Ion implanter having circular scanning platen,申请号KR20040111038-传众专利搜索

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发明名称	Ion implanter having circular scanning platen
摘要
申请公布号	KR100638425(B1)	申请公布日期	2006.10.24
申请号	KR20040111038	申请日期	2004.12.23
申请人		发明人
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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