| 摘要 |
A plasma display panel manufacturing apparatus is provided to form a deposition layer having a high crystalline characteristic by depositing a processing target on a substrate by using plasma. A plasma display panel manufacturing apparatus includes a process chamber(100), an electron beam generation unit(110), a plasma generation unit(140), a processing room(120) and a substrate installation unit. The process chamber provides an ion forming space. The electron beam generation unit supplies electron beams to the process chamber. The plasma generation unit is installed at one side of the process chamber in order to generate plasma by using a cathode electrode(141) and an anode electrode(143). The processing room is installed at a lower part of the process chamber. The substrate installation unit faces the processing room in order to support a substrate(S).
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